The market leader in 300mm horizontal diffusion furnaces for process temperatures up to 1200°C

The BDF-300 is the market share leader in 300mm horizontal diffusion furnaces. This 3 stack system is being used by the industry’s top discrete device manufacturers.

• The Model BDF-300 three stack diffusion furnace system is designed to process 300mm wafers.
• Fully automated cluster tool configurations available.
• The standard BTI convention for a right handed furnace is when viewing the furnace from the operator’s side, the load station is to the right and the source cabinet is to the left. Tube level one (1) is the uppermost tube and tube level three (3) is the lowest.
• BTI Standard Colors are standard light gray and charcoal gray. Refurbished equipment color will be as received.
• Installation, operation and maintenance instructions provided by pdf file or on clean room paper if needed are provided upon shipment.

Horizontal diffusion furnace for 200mm wafers Hundreds of installations worldwide

The BDF-200 horizontal diffusion furnace was designed to process 200mm wafers. The BDF-200 is the favorite workhorse of the analog semiconductor industry.

• The model BDF-200 three stack diffusion furnace system is designed to accept process 200mm wafers.
• The standard BTI convention for a right handed furnace is when viewing the furnace from the operator’s side, the load station is to the right and the source cabinet is to the left. Tube level one (1) is the uppermost tube and tube level three (3) is the lowest.
• BTI Standard Colors are standard light gray and charcoal gray. Refurbished equipment color will be as received.
• Installation, operation and maintenance instructions on clean room paper are provided upon shipment

Horizontal diffusion furnace for 200mm wafers and smaller

The BDF-41 is a four stack horizontal furnace for up to and including 200mm wafers. With hundreds of installations worldwide, the BDF-41 is known for its thermal control and reliability.

• The Model BDF-41 four stack diffusion furnace system is designed to accept process wafers up to and including 200mm in diameter.
• The standard BTI convention for a right handed furnace is when viewing the furnace from the operator’s side, the load station is to the right and the source cabinet is to the left. Tube level one (1) is the uppermost tube and tube level four (4) is the lowest.
• BTI Standard Colors are standard light gray and charcoal gray. Refurbished equipment color will be as received.
• Installation, operation and maintenance instructions on clean room paper are provided upon shipment.