GIGAfab Gen2 M
(Manual Loading Version)
The Plasma System GIGAfab Gen2 is designed for process development of
flat panel displays. The chamber is loaded manually. The glass plates are
easily placed in a flat position on the extractable drawer. Depending on the
gas selected, the plasma has various chemical effects on the surface to be
treated. The efficient microwave plasma source has no electrodes,
ensuring fast and uniform processing of large substrates.
GIGAfab Gen2 P
The GIGAfab Gen2 P is designed for production and features automated
loading capabilities by an external robot. The system is equipped with a
temperature controlled substrate plate with pins and gate valve.
