TYPICAL APPLICATIONS:
TECHNICAL DATA
PROCESS CHAMBER
Material: Aluminum
Dimension: 375 mm W x 762 mm D x 375 mm H
(14.75”x30”x14.75”)
Volume: 107 L (3.78 ft3)
Electrodes: 5 Shelf
Number of MFCs: 1
Process Pressure: (0.16 to 2.66) mbar
(120 to 2000) mTorr
Base Pressure: 0.07 mbar (50 mTorr)
Pumping Time: 1 min (Pump dependent)
Loading: Manual
PLASMA GENERATOR
Frequency/power: 13.56 MHz/600 W
SAFETY CERTIFICATION STANDARDS
CE certified
EN 60204
EN 61326
MACHINE DIMENSION AND WEIGHT
737 mm W x 1067 mm D x 1981mm H (29”x42”x78”)
350 kg (702 lb) (Varies with options)
Performance Data
Uptime: 95%
MTBF: >500 h
MTTR: <2 h
