RF GENERATOR
Air cooled
Frequency
100KHZ, 13.56 MHz
Power Output
0-1000 watts (standard)
0-1250 watts air cooled (optional)
POWER REQUIREMENTS
ELECTRICITY
208-240 VAC, 3 phase 30A
50/60 Hz 5-wire (standard)
380-415 VAC, 3 phase 15A
50/60 (optional)
PROCESS GAS
Input pressure 1-2bar / 30 PSI
PURGE GAS
Input pressure 1-2bar / 30 PSI
COMPRESSED AIR
Input pressure 5bar / 75 PSI
CHASSIS
Self contained footprint featuring all power and gasconnections
Roll around chassis with leveling feet
DIMENSIONS
1473 x 1064 x 1941mm
58” x 41.9” x 76.4”
WEIGHT
Control Cabinet
228 kg / 503 lbs.
Chamber Cabinet
239 kg / 527 lbs.
SAFETY CERTIFICATION STANDARDS
CE certified
EN 60204
EN 61326