Technical Data
PROCESS CHAMBER
Materials
Material Aluminum (A)
CHAMBER VOLUME & INNER DIMENSIONS
ION 100T
100 liters, 14.76” x 14.76” x 28” L
(375 x 375 x 711.20 mm L)
ION 140T
140 liters, 14.76” x 14.76” x 38” L
(375 x 375 x 965 mm L)
ION 190T
190 liters, 20” x 20” x 35” L
(508 x 508 x 863.60 mm L)
PROCESS GAS
Mass Flow Control
up to 6 gasses Process Pressure
Approx. 120-2000 mTorr
Evacuation Time ~1 minute (pump dependent)
RF GENERATOR
Air cooled
FREQUENCY
13.56 MHz
POWER REQUIREMENTS
ELECTRICITY
208-240 VAC, 3 phase 30A
50/60 Hz 5-wire (standard)
415-480 VAC, 3 phase 15A
50/60 (optional)
PROCESS GAS
Input pressure 1-2 bar / 30 PSI
Purge Gas Input pressure 1-2 bar / 30 PSI
Compressed Air Input pressure 5 bar / 75 PSI