RF GENERATOR
Air cooled
Frequency 100KHZ, 13.56 MHz, 2.45GHz
Power Output 0-600 watts (standard)
0-1250 watts air cooled (optional)
POWER REQUIREMENTS
Electricity 208-240 VAC, 3 phase 30A
50/60 Hz 5-wire (standard)
415-480 VAC, 3 phase 15A
50/60 (optional)
Process Gas Input pressure 1-2 bar / 30 PSI
Purge Gas Input pressure 1-2 bar / 30 PSI
Compressed Air Input pressure 5 bar / 75 PSI
CHASSIS
Self contained footprint featuring all power and gas
connections
Roll around chassis with leveling feet
DIMENSIONS
Standard 737 x 1980 x 1118 mm
29” x 78” x 44”
100 liters – A
Optional 635 x 1120 x 1473 mm
25” x 44” x 58”
135 liters – A
WEIGHT
350.45 kg / 771 lbs. (standard)
OPTIONS
1% pressure monitor
Recirculating liquid chiller
Pressure controller
Light tower
Barcode reader
Spectro graphic endpoint detection
MFC upgrade for corrosive gasses
Printer
Monomer processing kit
H2 generator unit
Wall mount package
Vacuum pumps (rotary vane, dry, scroll and blower package)
Vapor phase MFC
Vacuum pump options:
12cfm (20 m3/h)
18cfm (31 m3/h)
28cfm (48 m3/h)
Dry and Scroll pumps available
